Tungsten hexafluoride is generally used as the raw material for the chemical vapor deposition (CVD) process of tungsten metal in the electronics industry, especially tungsten disilicide (WSi2) made of it is a high-performance conductive ceramic material that can be used for large-scale Wiring materials in integrated circuits. In addition, tungsten hexafluoride can also be used as raw materials for semiconductor electrodes, fluorinating agents, polymerization catalysts, and raw materials for optical materials. With the accelerated development of the electronics industry and the continuous update and iteration of electronic products, the market has a greater demand for the production capacity of raw material tungsten hexafluoride, and also puts forward higher requirements for its purity, generally above 99.99%